CNC quartz parts for Reactive Ion Etching Chamber
Other description: custom design quartz glass parts; cnc quartz parts; quartz flange with holes
Material: Fused Quartz glass
Dimension: Custom length and bore diameter
Available material: Borosilicate glass (Pyrex glass), Fused Quartz glass,
Application: Used for solid-state laser pump xenon lamps, solid laser device filter in medical, industrial, and research applications.
Surface: Transparent or grinded
Quartz parts, through the CNC machining center, realize the precise and difficult machining of the curved surface, the inclined surface, the groove area, the spherical surface, the cylindrical surface, the aperture, and the cone angle of the product. The minimum aperture can reach 0.8 mm, and the minimum geometric tolerance can reach ±0.02 mm. The finish, surface shape, roughness and raw materials can be customized according to customer requirements. High product accuracy and long service life.
Material Properties for Quartz Glass
Physical Properties
Properties | Value | |
Mechanical Properties | Density | 2.203g/cm3 |
Compressive Strength | 1100Mpa | |
Bending Strength | 67Mpa | |
Tensile Strength | 48.3Mpa | |
Poisson's Ratio | 0.14~0.17 | |
Young’s Modulus | 72000Mpa | |
Rigidity Modulus | 31000Mpa | |
Mohs Hardness | 5.5~6.5 | |
Thermal Properties | Deformation Point | 1280℃ |
Softening Point | 1680℃ | |
Annealing Point | 1210℃ | |
Specific Heat (20~350℃) | 670J/kg.℃ | |
Thermal Conductivity (20℃) | 1.4W/m.℃ | |
Coefficient of thermal expansion | 5.5×10-7cm/cm.℃ | |
Hot Work Temperature | 1700~2000℃ | |
Short-term Use Temperature | 1300℃ | |
Long-term Use Temperature | 1100℃ | |
Electrical Properties | Resistivity | 7×107Ω.cm |
Dielectric Strength | 250~400Kv/cm | |
ε/ Dielectric Constant | 3.7~3.9 | |
Dielectric absorption coefficient | <4×104 | |
Dielectric loss coefficient | <1×104 |
Chemical Properties
Solution | Treatment condition | Corrosion capacity |
H2O | 95℃ 45(Hours) | 1~2×10-7 g/cm2 |
98%H2SO4 | 20℃ 2(Hours) | 1.4×10-8 g/cm2 |
60%HNO3 | 20℃ 2(Hours) | 5.0×10-8 g/cm2 |
36%HCl | 20℃ 2(Hours) | 15×10-8 g/cm2 |
5%NaOH | 100℃ 10(Hours) | 1.35×10-3 g/cm2 |
1%KOH | 98℃ 2(Hours) | 68×10-6 g/cm2 |
Purity
Name | Impurities ppm | ||
Synthetic (CVD)JGSI | Oxy-hyd melting JGS2 | Electrical melting JGS3 | |
Al | 0.16 | 17.00 | 14.44 |
Fe | 0.01 | 0.36 | 1.46 |
Ca | 0.31 | 1.30 | 2.45 |
Mg | 0.65 | 0.22 | 0.46 |
Ti | 0.08 | 1.3 | 4.84 |
Cu | 0.01 | 0.04 | 0.16 |
Ni | 0.01 | 0.01 | 0.04 |
Co | 0.04 | 0.01 | 0.02 |
Mn | 0.01 | 0.03 | 0.08 |
K | 0.34 | 0.63 | 2.16 |
Na | 0.06 | 1.11 | 1.33 |
Li | 0.01 | 0.63 | 0.81 |
B | / | 0.08 | 0.05 |
OH | 1100~1300 | 150~250 | 1~120 |
SiO2 | >99.999% | 99.99% | 99.92% |
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